From cast10-request@bevo.che.wisc.edu Wed Apr 5 21:29:43 2000 Received: (from slist@localhost) by bevo.che.wisc.edu (8.9.1/8.9.1) id VAA19802; Wed, 5 Apr 2000 21:29:43 -0500 (CDT) Resent-Date: Wed, 5 Apr 2000 21:29:43 -0500 (CDT) MIME-Version: 1.0 Content-Type: text/plain; charset=us-ascii Content-Transfer-Encoding: 7bit Message-ID: <14571.63125.864007.443987@bahaha.che.wisc.edu> Date: Wed, 5 Apr 2000 21:29:41 -0500 (CDT) From: "Raymond A. Adomaitis" To: cast10@bevo.che.wisc.edu Subject: CAST: Control of Microelectronic Manufacturing Processes X-CAST-Category: meetings 2000-11 Resent-Message-ID: <"F6lh62b3EyK.A.xUD.Wa_64"@bevo.che.wisc.edu> Resent-From: cast10@bevo.che.wisc.edu X-Mailing-List: X-Loop: cast10@bevo.che.wisc.edu Precedence: list Resent-Sender: cast10-request@bevo.che.wisc.edu Sender: cast10-request@bevo.che.wisc.edu Errors-To: cast10-request@bevo.che.wisc.edu ----------------------------------------------------------------- NOTE: Past postings on the CAST10 Email List are archived on the World Wide Web at http://www.che.wisc.edu/cast10 ----------------------------------------------------------------- CALL FOR PAPERS CONTROL OF MICROELECTRONIC MANUFACTURING PROCESSES [10b12] Co-sponsored by 08E 2000 AIChE Annual Meeting November 12 - 17, Los Angeles, CA Papers are sought which describe process control applications to microelectronics material and device manufacturing processes. Real-time and run-to-run control are both of interest, as well as process optimization applications. Papers concerning controller design, including model development for control, model reduction, and optimization methods are desired. Parameter identification and model validation studies are of particular interest. Controller monitoring and performance assessment, fault detection, and fault classification papers will be considered for this session. Finally, contributions discussing novel metrology and other process and wafer state sensing applications are solicited. Chair: T. J. Mountziaris SUNY at Buffalo Department of Chemical Engineering Buffalo, NY 14260 Phone: 716-645-2911 x2212 Fax: 716-645-3822 Email: tjm@eng.buffalo.edu Vice-Chair: Raymond A. Adomaitis Dept of Chemical Engineering & Institute for Systems Research University of Maryland College Park, MD 20742 Ph: 301/405-2969 Fax: 301/314-9920 E-mail: adomaiti@isr.umd.edu